A position sensing detector for extreme ultraviolet radiation

In this project, researchers at Mid Sweden University and the company SiTek Electro Optics, will develop a position sensing detector that will expand the wavelength range of detectors down to the extremely ultraviolet (EUV) range, with a specific interest in wavelength 13.5 nm (92 eV).

Hand holding a square plate under a microscope.

This wavelength is the new standard used by the photo lithography mask aligners that are a necessity for the semiconductor industry to continue to follow Moore's law. By using the SPECIES beam tube at MAX IV for evaluation of how different detector designs affect parameters as well as nonlinearity and sensitivity as well as radiation hardness for 92 eV, the time for developing an EUV-sensitive PSD can be significantly shortened.